An ITO/Au/ITO Thin Film Gas Sensor for Methanol Detection at Room Temperature
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منابع مشابه
Structural Properties of Post Annealed ITO Thin Films at Different Temperatures
Indium tin oxide (ITO) thin films were deposited on glass substrates by RF sputtering using an ITO ceramic target (In2O3-SnO2, 90-10 wt. %). After deposition, samples were annealed at different temperatures in vacuum furnace. The post vacuum annealing effects on the structural, optical and electrical properties of ITO films were investigated. Polycrystalline...
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Thin films Indium tin oxide (ITO) with various thicknesses, from 130-620nm, have been deposited on the thin glass substrates by RF sputtering using ITO ceramic (90% wt. In2O3 and 10% wt. SnO2) target, and subsequently annealed in vacuum at various temperatures. Electrical and optical characteristics of ITO samples, before and after annealing at different temperatures, were investigated by four ...
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تاریخ انتشار 2010